Kaufman & Robinson (KRI®)www.ionsources.com
Ion, Plasma, and Electron Source Products
Kaufman and Robinson, Inc. (KRI®) engineers and manufactures broad beam ion and plasma products. Kaufman KRI® products are vacuum-based process tools which interact with materials at the atomic level. Typical material processes include the precision deposition of thin films, remote plasma etching of patterned wafers, and nanometer-scale modification of surfaces. KRI® is respected across the globe for innovative designs, product quality and technical expertise. KRI® products incorporate technical features such as gridded or gridless sources, DC or RF discharges and automated power supply controllers.