Multi ionization gauge ST200-E

Features

• ULVAC own concept: Sensor heads with different measurement ranges can be connected according to application.
• World's first metal type triode ionization gauge (patented): Stable measurement over extended periods even in harsh environment for vacuum gauges.
• High usability: Checking measurement status or data logging possible by connecting a PC/Android device.
• Compact: Achieved significant downsizing from the previous model (56% reduction in controller volume), world's smallest class.
• Wide range measurement: Measurements from atmospheric pressure to high vacuum range (1 x 10+5 to 1 x 10-5Pa) are possible (when used with optional unit SWU10-R).
• Accurate atmospheric pressure measurement: Atmospheric pressure check for chamber open is possible (when used with optional unit SAU).

Applications

• Checking ultimate pressure and process control in manufacturing equipment such as OLEDs and touch panels.
• Checking ultimate pressure in various industrial vacuum equipment such as vacuum furnaces.
• Environments with high hydrocarbon (oil-based) content.
• Environments with residual cutting oil or cleaning fluids during vacuum component processing.