Multi ionization gauge SH200-E

Features

• ULVAC own concept: Sensor heads with different measurement ranges can be connected according to application.
• Compact: Achieved significant downsizing from the previous model (56% reduction in controller volume), world's smallest class
• High usability: Checking measurement status or data logging possible by connecting a PC/Android device.
• Wide range measurement: Measurements from atmospheric pressure to ultra-high vacuum range (1 x 10+5 to 5 x 10-8Pa) are possible (when used with optional unit SWU10-R).
• Accurate atmospheric pressure measurement: Atmospheric pressure check for chamber open is possible (when used with optional unit SAU).

Applications

• Process control of various manufacturing equipment, including semiconductors and electronic components.
• Checking the ultimate pressure of various manufacturing equipment with multiple process chambers, such as inline or single-wafer types.
• Pressure measurement in high-vacuum and ultra-high-vacuum equipment.