MFC 2172 – Mass Flow Controller
The Axetris compact mass flow controller MFC 2172 with EtherCAT interface is based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).
It offers the following advantages:
- Ultra compact size
- Fast settling time < 150 ms
- Excellent repeatability and accuracy
- Rigid stable design
- High dynamic range > 1000:1
- High long-term stability
- Ethernet connectivity with an EtherCAT interface
It is recommended for standalone applications and system integration in industrial, analytical and medial applications where the MFCs need to be integrated into Ethernet-based networks with an EtherCAT communication interface.
Axetris mass flow meters and controllers are based on the in-house MEMS flow chip (YouTube video), and have helped OEMs worldwide achieve the highest performance in their applications, whether it be in industrial applications such as thin film processes, or in highly-reproducible analytical instruments.