Fachbereich 1.4 Gase,
Physikalisch-Technische Bundesanstalt (PTB)

PTB is the National Metrology Institute of Germany with scientific and technical service tasks. PTB measures with the highest accuracy and reliability – metrology as the core competence. The Department of Gas Flow has metrological competence in the measurement of speed, quantity and the flowrate of gas flows as well as caloric quantities. The main tasks are providing national primary and secondary standards for the realization and dissemination of the units, developing and improving new measuring techniques and standard devices, performing type examinations and calibration of gas meters, representing the PTB in national and international organisations and consulting in matters of measurement of speed, quantity and flowrate of gas flows and caloric quantities.
www.ptb.de/cms/ptb/fachabteilungen/abt1/fb-14

Working Group 5.22 Displacement Interferometry,
Department 5.2 Dimensional Nanometrology,
Division 5 Precision Engineering,
Physikalisch-Technische Bundesanstalt (PTB)

The main tasks of the PTB’s Working Group 5.22 "Displacement Interferometry" as part of the Department 5.2 "Dimensional Nanometrology" are to develop and to optimize measurement methods, standards and instrumentation in the area of dimensional nanometrology and to disseminate dimensional measurands by calibration of suitable micro- and nanostructured measurement objects.
www.ptb.de/cms/ptb/fachabteilungen/abt5/fb-52/ag-522/vergleichsmessungen522.html

Arbeitsgruppe 5.23 3D Nanometrologie,
Physikalisch-Technische Bundesanstalt (PTB)

PTB working group 5.23 focuses on research and development of reference three-dimensional (3D) nanometrology of complex nanostructures, including measurements of feature width (CD), height, edge profile, sidewall angle (SWA), corner rounding, footing, contour and line edge/width roughness (LER/LWR), thus ensuring the traceability of various nano measurement tools such as optical scatterometry, atomic force microscopy (AFM) and scanning electron microscopy (SEM). The main research topics are advanced Scanning Probe Microscopy (SPM), e.g., high-speed metrological large-range Atomic Force Microscopy (AFM) and 3D/CD-AFM, including the development of advanced metrology techniques, traceability routes, physical and documentary standards, calibration strategies, algorithms and software.
www.ptb.de/cms/ptb/fachabteilungen/abt5/fb-52/ag-523.html