Nanomotion

Nanomotion designs and manufactures precision motion systems, based on the principles of ultrasonic standing wave piezo motors. Its motors and motion systems bring unique benefits to applications in semiconductor metrology, microscopy, life science, and optronic applications. The utilization of a unique piezo electric motor provides distinct benefits in size and precision. Small motors are designed into optronic solutions as well as wearable pumps for precise dosing. Larger motors are applied to multi-axis stages working in the nanometer domain for next generation semiconductor tools. Motion systems are controlled by traditional servo controls and power amplifiers, with the ability to configure single and multi-axis motion systems.