Fluctuation Free Facility (FFF),
New Industry Creation Hatchery Center (NICHe),
The researches at Fluctuation Free Facility are aiming to realize "Ultra-Large-Scale-Integration (ULSI), which features flexibility and high intelligence." The area of the research covers all silicon technologies. Currently, the focused issues are the development of infrastructure for ultra-short TAT semiconductor manufacturing, the development of manufacturing equipment using plasma, research on process technology, development of ultra-high speed device, electronic circuit for information processing with intelligence, and research on algorithms reducing computing costs.