nanoFaktur

nanoFaktur is a technology-leading supplier of nano-positioning systems. These systems deliver sub-nanometer resolution and repeatability in the low nanometer range. Drives and guidance are being realized via elastic deformation. There is no friction and thus no wear. Drives are being made on the base of piezo-actuators. These are not only high-resolving, but can also be very fast: Step-responses to the sub-millisecond magnitude. A lifetime of ten billion cycles is typical. Applications are mainly in semiconductor manufacturing, high-accuracy metrology and near-field microscopy.