EtherCAT Seminar Singapore
   

 

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3:00 pm - 3:20 pm

EtherCAT Based Temperature Control System for Front End Wafer Processing (FEWP) Tools

Abstract: Watlow has added EtherCAT communication capabilities to its EZ-ZONE® RM (Rail Mount) controller platform that supports traditional TC and RTD sensors as well as RF-immune optical pedestal sensors. Watlow’s RMZ, an integrated EtherCAT based control platform, offers the scalability, versatility, and performance required for the semiconductor industry. RMZ implements the ETG.5003.2060 Semiconductor Standard. This allows easy integration of chuck, chamber, lid, and fore-line heater control with the tool’s master control system. The flexibility combined with optical sensing makes RMZ the perfect temperature control solution for FEWP processing tools.

Speaker:

Stan Breitlow, Principle Engineer / Semiconductor System Designers, Watlow

Stan Breitlow Stan Breitlow has been with Watlow for 22 years. He chaired the ETG Temperature Controller TWG for Semiconductor Working Group producing the ETG.5003.2060 standard. He was lead firmware developer on many Watlow controllers including the EZ-ZONE product family. He is a graduate with a BSEE from the University of Minnesota.
   
   
EtherCAT Technology Group | Ostendstr. 196 | 90482 Nuremberg, Germany | info@ethercat.org | www.ethercat.org
 

 

Date and Venue:

March 18, 2014
Carlton Hotel, Singapore

 

Sponsors & Partner: